Substrate processing system managing apparatus information of substrate processing apparatus

ABSTRACT

A substrate processing apparatus and an information storage server are connected with each other through a network. A storage part of the substrate processing apparatus stores set information and a control program, for controlling operation of the substrate processing apparatus according to the set information and the control program. The substrate processing apparatus is provided with a schedule function, for transmitting a backup instructional command according to the schedule. In response to this instructional command, the substrate processing apparatus generates a duplicate of specified information stored in the aforementioned storage part and transfers the duplicate information to the information storage server through the network. The information storage server stores the received duplicate information in a hard disk as backup data. The information storage server can also store only differential data of the duplicate information. Thus, information for controlling the operation of the substrate processing apparatus can be efficiently backed up without burdening the user.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a network communication techniqueconnecting a substrate processing apparatus performing prescribedprocessing on a semiconductor substrate, a glass substrate for a liquidcrystal display, a glass substrate for a photomask or a substrate for anoptical disk (hereinafter simply referred to as “substrate”) and acomputer with each other through a network.

2. Description of the Background Art

A product such as a semiconductor device or a liquid crystal display ismanufactured by performing a series of processing such as cleaning,resist coating, exposure, development, etching, formation of aninterlayer dielectric film and thermal processing on a substrate. Ingeneral, a substrate processing apparatus having a built-in resistcoating processing, a built-in development processing unit etc. performssuch processing. A transfer robot provided on the substrate processingapparatus successively transfers the substrate to the respectiveprocessing units thereby performing the series of processing on thesubstrate.

Such substrate processing is automatically controlled, and the substrateprocessing apparatus stores application program data, set informationetc. for the automatic control. In other words, the substrate processingapparatus is controlled through the application program according to thecontents of the set information.

The set information stored in the substrate processing apparatusincludes basic information employed in common for the substrateprocessing apparatus and information intrinsic to the substrateprocessing apparatus. While the substrate processing apparatus isessentially controllable by basic information set by default, optimumcontrol cannot be performed with the same set contents due to the setenvironment or a manufacturing error of the substrate processingapparatus. Therefore, the basic information must be corrected forperforming control, and each substrate processing apparatus accumulatesthis corrected information as intrinsic information.

Therefore, the intrinsic information is information intrinsic to everyuser and every substrate processing apparatus. In order to return asubstrate processing apparatus causing some fault such as a hardwarefault and losing accumulated information to the state before theoccurrence of the fault, therefore, it is necessary to periodically backup the set information. Also when the user changes the set informationin a self-determined manner, past set information may be required. Alsoin order to operate the substrate processing apparatus with the past setinformation in this case, it is necessary to periodically back up theset information. In general, the user backs up the set information in aremoval disk or the like in each substrate processing apparatus.

However, it is extremely time-consuming to back up the set informationof the substrate processing apparatus in the removal disk or the like,leading to a burden on the user. Particularly when a large number ofsubstrate processing apparatuses are set, the backup operationremarkably burdens the user, who in turn awaits improvement.

Further, it is necessary to minimize the interval for backup processingso that the backup data is effective. However, the burden of the backupprocessing is so heavy that it is impractical to require the user tofrequently perform periodic backup processing.

The aforementioned basic information, set in the substrate processingapparatus in an initial stage, consists of an extremely large number ofset items. The user or a support staff first sets the basic informationin the substrate processing apparatus, thereby operating the substrateprocessing apparatus according to the basic information. The userfurther sets intrinsic information in response to the individualsubstrate processing apparatus. In other words, the user corrects theoperation of the substrate processing apparatus set according to thebasic information with the intrinsic information thereby performingoptimum control.

As hereinabove described, the basic information to be set in thesubstrate processing apparatus consists of an extremely large number ofset items. If the set information is erroneous as to some of the largenumber of items, the substrate processing apparatus cannot performplanned operation.

When a plurality of staff set basic information in different substrateprocessing apparatuses respectively in a factory provided with aplurality of substrate processing apparatuses, for example, the setcontents of the basic information may vary with the substrate processingapparatuses due to artificial errors. In this case, the same productscannot be produced even if the substrate processing apparatuses executethe same processing.

Also when it is proved that the basic information set in each substrateprocessing apparatus includes a set error from the results of operationof the substrate processing apparatus, it is extremely difficult to findthe erroneous set contents from the large number of set items.

Components forming the aforementioned substrate processing apparatusalso include consumables. For example, cleaning brushes provided in acleaning processing unit for cleaning substrates or lamps provided in alamp annealing apparatus for rapidly annealing substrates byphotoirradiation are typical consumables. Further, belts, cylinders,motors etc. forming a driving mechanism for driving the transfer robotor the like are also consumables.

Such consumables consumed and deteriorated as used become unusable uponremarkable consumption, and hence it is necessary to periodically ordernew components for exchanging for the consumables.

In general, however, the new components are ordered and procured afterthe consumables are consumed or broken, and hence it follows thatconstant time is required up to arrival of the new components todisadvantageously reduce the working efficiency of the apparatus. Whileit is therefore preferable to manage the lives of the consumables in thesubstrate processing apparatus, a plurality of substrate processingapparatuses are arranged in a single substrate processing factory andremarkable labor is required for managing consumables in all substrateprocessing apparatuses.

In general, further, a large number of such substrate processingapparatuses are arranged in a single substrate processing factorymanufacturing semiconductor devices or the like and operated by a numberof operators. Therefore, it is necessary to properly educateexperienceless unskilled operators as to the method of manipulating theapparatuses. When specifications etc. of the apparatuses are changed, itis also necessary to lecture skilled operators about the new operatingmethod.

In general, the operators must divide into groups for attending alecture about the apparatuses repetitively delivered for the groups orgather around only a single substrate processing apparatus for getting acollective explanation thereof.

In this case, however, the lecture must be repeated as to the samecontents or not all operators can be sufficiently trained,disadvantageously leading to inefficiency for both users and vendors ofthe substrate processing apparatuses.

SUMMARY OF THE INVENTION

The present invention is directed to a substrate processing apparatusmanagement system managing a substrate processing apparatus capable ofmaking communication through a network.

According to an aspect of the present invention, a substrate processingapparatus management system managing a substrate processing apparatuscapable of making communication through a network comprises a firststorage element storing control information for controlling operation ofthe substrate processing apparatus, a duplicate information acquisitionelement acquiring duplicate information of the control informationstored in the first storage element, and a storing element storing theduplicate information acquired by the duplicate information acquisitionelement in a second storage element comprised in an information storagecomputer connected to the substrate processing apparatus through thenetwork.

The storage element of the information storage computer connectedthrough the network stores the control information for the substrateprocessing apparatus, whereby no backup operation to a recording mediumis necessary. Thus, a user's burden related to backup operation can beremarkably abated.

In a substrate processing apparatus management system connecting asubstrate processing apparatus and a support computer with each otherthrough a network according to another aspect of the present invention,the support computer comprises a first storage element storing basicinformation necessary in initialization of the substrate processingapparatus, and a basic information transmission element transmitting thebasic information to the substrate processing apparatus through thenetwork, the substrate processing apparatus comprises a second storageelement storing the basic information received from the supportcomputer, and the initial state of the substrate processing apparatus isset up with the basic information stored in the second storage element.

Initialization can be correctly and readily performed in introduction orresetting of the substrate processing apparatus.

In a substrate processing apparatus management system having a substrateprocessing apparatus and a computer managing the substrate processingapparatus, both connected to a network, in still another aspect of thepresent invention, the substrate processing apparatus comprises aconsumptiveness measuring element measuring consumptiveness of acomponent of the substrate processing apparatus, and the substrateprocessing apparatus management system comprises a consumptivenessinformation accumulation element accumulating the consumptivenessmeasured by the consumptiveness measuring element, and a consumptivenessinformation uncasing element rendering the consumptiveness accumulatedin the consumptiveness information accumulation element readable fromthe computer through the network.

The consumptiveness of the component of the substrate processingapparatus can be efficiently managed.

In a substrate processing apparatus management system connecting aplurality of substrate processing apparatuses and a computer with eachother through a network according to a further aspect of the presentinvention, the computer comprises an educational informationdistribution element distributing educational information related tooperation of the plurality of substrate processing apparatuses throughthe network, and each of the plurality of substrate processingapparatuses comprises a receiving element receiving the educationalinformation distributed from the computer, and a display elementdisplaying the educational information received by the receivingelement.

The computer distributes the educational information related tooperation of the plurality of substrate processing apparatuses throughthe network, whereby operational education can be efficiently given tooperators.

The present invention is also directed to a substrate processingapparatus management method for managing a substrate processingapparatus.

The present invention is also directed to a substrate processingapparatus connected with a prescribed computer through a network.

Accordingly, an object of the present invention is to provide atechnique of readily backing up information stored in a substrateprocessing apparatus while abating the job burden on a user.

Another object of the present invention is to provide a network systemfor readily and reliably setting initial operation of a substrateprocessing apparatus while reducing the job burden on a user or asupport staff.

Still another object of the present invention is to provide a techniquecapable of efficiently managing the consumptiveness of a component of asubstrate processing apparatus.

A further object of the present invention is to provide a substrateprocessing system capable of efficiently operationally educating anoperator.

The foregoing and other objects, features, aspects and advantages of thepresent invention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block diagram of a substrate processing systemaccording to a first embodiment of the present invention;

FIG. 2 is a schematic plan view of a substrate processing apparatus;

FIG. 3 is a block diagram showing the structure of a control system forthe substrate processing apparatus;

FIG. 4 illustrates the basic structure of an information storage serveror a support computer;

FIG. 5 illustrates exemplary contents of set information;

FIG. 6 illustrates exemplary contents of recipe data;

FIG. 7 is a block diagram showing the functional structure of thesubstrate processing system according to the first embodiment;

FIG. 8 is a block diagram of a local instruction part including aschedule control part according to the first embodiment;

FIG. 9 is a block diagram showing the functional structure of asubstrate processing system according to a second embodiment of thepresent invention;

FIG. 10 illustrates apparatus basic data of versions managed in asupport computer according to the second embodiment;

FIG. 11 schematically illustrates the structure of a substrateprocessing system according to a third embodiment of the presentinvention;

FIG. 12 is a schematic plan view of a substrate processing apparatusaccording to the third embodiment;

FIG. 13 schematically illustrates the structure of a surface cleaningprocessing unit of the substrate processing apparatus shown in FIG. 12;

FIG. 14 is a block diagram showing the structure of a control system forthe substrate processing apparatus according to the third embodiment;

FIG. 15 illustrates the basic structure of an information storageserver, a support computer or an order acceptance server;

FIG. 16 is a functional block diagram showing the functional structureof the substrate processing system according to the third embodiment;

FIG. 17 is a flow chart showing the procedure in the substrateprocessing system according to the third embodiment;

FIG. 18 illustrates exemplary consumptiveness information;

FIG. 19 is a functional block diagram showing the functional structureof another substrate processing system according to the third embodimentprovided with a substrate processing apparatus having a warning functionand a function of transmitting a component order signal;

FIG. 20 is a functional block diagram showing an exemplary functionalstructure of a substrate processing system according to a fourthembodiment of the present invention; and

FIG. 21 is a functional block diagram showing another exemplaryfunctional structure of the substrate processing system according to thefourth embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention are now described with reference tothe drawings.

1. First Embodiment

First, the outline of the overall substrate processing system 10according to a first embodiment of the present invention is described.FIG. 1 schematically illustrates the structure of the substrateprocessing system 10. As shown in FIG. 1, a plurality of substrateprocessing apparatuses 1 and an information storage server 2 comprisedin a substrate processing factory 4 and support computers 3 comprised ina support center 5 are connected with each other through a network 6 inthe substrate processing system 10. Remote control staffsremote-controlling the substrate processing apparatuses 1 are posted onthe support center 5.

In the substrate processing factory 4, the substrate processingapparatuses 1 and the information storage server 2 are connected witheach other through a LAN (local area network) 41. The LAN 41 isconnected to a wide area network 61 such as the Internet through aconnector 42 having functions of a router, a firewall and the like. Thesupport center 5 also has a LAN 51 connected with the support computers3, and this LAN 51 is also connected to the wide area network 61 througha connector 52 having functions of a router, a firewall and the like.Thus, the substrate processing apparatuses 1, the information storageserver 2 and the support computers 3 can make various types of datacommunication with each other. Throughout the specification, the LANs 41and 51 and the wide area network 61 are generically referred to as anetwork 6.

Referring to FIG. 1, the substrate processing factory 4 mayalternatively comprise a single substrate processing apparatus 1 inplace of the plurality of substrate processing apparatuses 1, and thesupport center 5 may also alternatively comprise a single supportcomputer 3 in place of the plurality of support computers 3.

Each of the substrate processing apparatus 1 arranged on the substrateprocessing factory 4 is now described. FIG. 2 is a schematic plan viewof the substrate processing apparatus 1. This substrate processingapparatus 1 performs resist coating processing, development processingand subsequent thermal processing on substrates. The substrateprocessing apparatus 1 comprises an indexer ID delivering unprocessedsubstrates from a carrier while receiving processed substrates andstoring the same in the carrier, coating processing units (the so-calledspin coaters) SC dropping photoresist on the main surfaces of substrateswhile rotating the substrates for coating the photoresist thereto,development processing units (the so-called spin developers) SDsupplying a developer to exposed substrates thereby performingdevelopment processing and a transfer robot TR transferring thesubstrates between the indexer ID and each processing unit. Thermalprocessing units (not shown) are arranged above the coating processingunits SC and the development processing units SD through a fan filterunit. A heating unit (the so-called hot plate) heating the substratesand a cooling unit (the so-called cool plate) cooling the heatedsubstrates to a constant temperature are provided as the thermalprocessing units. Throughout the specification, the coating processingunits SC, the development processing units SD and the thermal processingunits are generically referred to as processing units 110 performingprescribed processing on the substrates.

FIG. 3 is a block diagram showing the structure of a control system forthe substrate processing apparatus 1. As shown in FIG. 3, the controlsystem for the substrate processing apparatus 1 is formed by a systemcontrol part 100 controlling the overall apparatus 1 and unit controlparts 115 individually controlling the plurality of processing units110.

The system control part 100 controlling the overall apparatus 1 in aunific manner comprises a microcomputer. More specifically, the systemcontrol part 100 comprises a CPU 101 serving as a body part, a ROM 102serving as a read—only memory storing a basic program and the like, aRAM 103 serving as a random-access memory mainly defining an arithmeticworking area, a storage part 104 consisting of a hard disk or the likestoring application program data and the like and a communication part105 performing data communication with an external device, which areconnected with each other by a bus line 190.

The communication part 105 is connected to the network 6 through anetwork interface (not shown), so that the substrate processingapparatus 1 can transmit/receive various data to/from the informationstorage server 2, the support computers 3 and the like. While thecommunication part 105 may perform either wire communication or radiocommunication through the network 6, a wire communication system isemployed in this embodiment.

Along with the system control part 100 and the plurality of processingunits 110, a display part 130 displaying various information, anoperation part 140 accepting recipe input operation, command operationetc. from an operator, a reader 150 reading various data from arecording medium 91 such as a magnetic disk or a magnetooptic disk andthe like are also electrically connected to the bus line 190. Thus, datacan be transferred between the respective parts of the substrateprocessing apparatus 1 through the bus line 190 under control of thesystem control part 100.

Each processing unit 110 comprises the unit control part 115 along witha substrate processing part 116 serving as a working part (a mechanismrotating the substrates, a mechanism discharging a processing solutionto the substrates, a mechanism heating the substrates or the like, forexample) processing the substrates in practice. The unit control part115, individually controlling the processing unit 110, controls andmonitors operation of the substrate processing part 116 of theprocessing unit 110 provided with this unit control part 115. In otherwords, the aforementioned system control part 100 takes charge of unificcontrol on the overall substrate processing apparatus 1, while each unitcontrol part 115 takes charge of control responsive to the processingcontents of each substrate processing part 116. The unit control part115 comprises a microcomputer similarly to the system control part 100.More specifically, the unit control part 115 comprises a CPU 111 servingas the body part, a ROM 112 serving as a read-only memory storing abasic program and the like, a RAM 113 serving as a random-access memorydefining an arithmetic working area and a storage part 114 consisting ofan SRAM backed up with a battery for storing various data.

The storage part 104 of the system control part 100 stores a controlprogram 152 serving as an application program for system control relatedto the overall apparatus 1, set information 151 for defining operationof the substrate processing apparatus 1 and the like (see FIG. 7). Whenthe CPU 101 of the system control part 100 executes arithmeticprocessing according to the control program 152 and the set information151, it follows that operation control and data processing areimplemented on the overall substrate processing apparatus 1. The storagepart 114 of the unit control part 115 stores a control program 153serving as an application program for unit control responsive to theprocessing contents of the substrate processing part 116 of thisprocessing unit 110. When the CPU 111 of the unit control part 115executes arithmetic processing according to this control program 153, itfollows that operation control and data processing are. implemented onthe substrate processing part 116.

Thus, control information for controlling the operation of the substrateprocessing apparatus 1 includes the control programs 152 and 153 forcontrolling the substrate processing apparatus 1 and the set information151 for defining the operation of the substrate processing apparatus 1,while the storage parts 104 and 114 form first storage means storing thecontrol information.

The information storage server 2 arranged on the substrate processingfactory 4 and each support computer 3 arranged on the support center 5are now described. The information storage server 2 and the supportcomputer 3 are similar in hardware structure to a general computer.Therefore, each of the basic structures of the information storageserver 2 and the support computer 3, which are similar to each other, isdescribed with reference to FIG. 4. As shown in FIG. 4, each of theinformation storage server 2 and the support computer 3 is formed byconnecting a CPU 21 or 31 (the CPU 21 for the information storage server2 and the CPU 31 for the support computer 3: this also applies to thefollowing description), a ROM 22 or 32 storing the basic program and aRAM 23 or 33 storing various information to a bus line. A hard disk 24or 34 storing various information such as an application program, adisplay 25 or 35 displaying various information, a keyboard 26 a or 36 aand a mouse 26 b or 36 b accepting input operation from the operator, areader 27 or 37 reading various data from the recording medium 91 suchas an optical disk, a magnetic disk or a magnetooptical disk and acommunication part 28 or 38 making communication with the externaldevice through the network 6 are also connected to the bus line properlythrough interfaces (I/F) or the like.

Each of the information storage server 2 and the support computer 3 canread data from the recording medium 91 through the reader 27 or 37 andstore the same in the hard disk 24 or 34. Each of the informationstorage server 2 and the support computer 3 can also download data fromanother server through the network 6 and store the same in the hard disk24 or 34. The CPU 21 or 31 executes arithmetic processing according tovarious programs stored in the hard disk 24 or 34 for performing variousoperation.

The operation of the substrate processing apparatus 1 is controlled bythe control program 152 or 153 stored in the storage part 104 or 114according to the procedure of a previously described flow recipe. Thecontrol program 152 or 153 controls the substrate processing apparatus 1according to the set information 151 stored in the storage part 104.FIG. 5 illustrates exemplary contents of the set information 151 storedin the storage part 104.

The set information 151 includes set information related to totalcontrol of the substrate processing apparatus 1 and set informationrelated to control of each processing unit 110, and it is assumed thatthe storage part 104 of the system control part 100 collectively storesthe set information 151 including the same in this embodiment.Alternatively, the storage part 114 of each unit control part 115 maystore the set information every processing unit 110.

The set information 151 is data including recipe data 151 a, apparatusbasic data 151 b and apparatus intrinsic data 151 c. The operatorinput-controls these data 151 a, 151 b and 151 c through the operationpart 140 thereby updating the same with correction at need.Alternatively, the support computer 3 or the information storage server2 may input-control the set information 151 by remote control.

The recipe data 151 a is data defining the procedure of the substrateprocessing apparatus 1. In other words, the transfer robot TR of thesubstrate processing apparatus 1 transfers the substrates to the targetprocessing unit 110 according to a processing schedule described in therecipe data 151 a.

FIG. 6 illustrates an exemplary flow recipe described in the recipe data151 a. Referring to FIG. 6, each substrate transferred by the transferrobot TR in a circulatory manner is processed in the following sequence:

-   -   Step 1: adhesion reinforcement processing in the hot plate;    -   Step 2: cooling processing in the cool plate;    -   Step 3: resist coating processing in any coating processing unit        SC;    -   Step 4: prebake processing in the hot plate;

Thus, the recipe data 151 a, which is information defining the procedureof the substrate processing apparatus 1, is stored as the know-how of auser. In other words, the user creates the recipe data 151 a to becapable of performing most efficient processing, and controls thesubstrate processing apparatus 1 is controlled according to the recipedata 151 a.

The apparatus basic data 151 b is set information common to thesubstrate processing apparatus 1, i.e., default set information for thesubstrate processing apparatus 1. While the substrate processingapparatus 1 includes a large number of working parts and control partssuch as the transfer robot TR an each processing unit 110, the apparatusbasic data 151 b defines set values for driving the working parts andthe control parts. The apparatus basic data 151 b includes data such asrobot basic data, temperature control data and the like, for example.

The robot basic data defines the operation of the transfer robot TR. Inother words, the robot basic data defines set values (a set valuerelated to the distance of movement, a set value for the rotationalangle of an arm etc.) for the operation of the transfer robot TRtransferring the substrates to each processing unit 110, the indexer ID,the thermal processing units etc. The temperature control data sets thetemperatures of the thermal processing units etc. in the substrateprocessing apparatus 1.

The apparatus intrinsic data 151 c is correction data intrinsically setfor each of the plurality of substrate processing apparatuses 1. Whilethe substrate processing apparatuses 1 can be basically controlled withthe same set information, i.e., the apparatus basic data 151 b, when thesame are identical in structure to each other, the set information mustbe corrected every apparatus 1 in practice. This is because thestructures of the substrate processing apparatuses 1 are dispersed in astrict sense, and because adjustment responsive to environment isrequired due to the difference between set positions or set environmentof the substrate processing apparatuses 1. In other words, the setinformation must be corrected every apparatus 1 so that the substrateprocessing apparatuses 1 perform the same processing thereby bringingthe same processing results.

The apparatus intrinsic data 151 c includes data such as teaching dataand temperature control correction data, for example.

The teaching data is data for correcting the aforementioned robot basicdata. The transfer robot TR may basically perform the same operationaccording to the same set information when the substrate processingapparatuses 1 are identical in structure to each other. However, thetransfer robot TR including a large number of components and movableparts causes an error in the operation due to subtle difference betweenthe structures. Therefore, the operation of the transfer robot TR isadjusted to be optimum, and set information for this adjustment isstored as the teaching data. Control of the transfer robot TR can beoptimized by correcting the robot basic data with the teaching data.

The temperature control correction data is data for correcting thetemperature control data set by default in response to the differencebetween the set positions and the set environment of the substrateprocessing apparatuses 1.

Thus, the recipe data 151 a decides the sequence of processing steps foreach substrate processing apparatus 1, while the apparatus basic data151 b set by default and the apparatus intrinsic data 151 c which iscorrection data every apparatus 1 control the operation of the substrateprocessing apparatus 1. While the recipe data 151 a stored as the user'sknow-how and the apparatus intrinsic data 151 c intrinsic to eachapparatus 1 are extremely important information, it is not easy torestore these data 151 a and 151 c. Therefore, the data 151 a and 151 cmust be efficiently backed up, to be prevented from disappearance.

While the hardware structures of the substrate processing system 10 andthe substrate processing apparatus 1, the information storage server 2and the support computer 3 forming the same and the contents of the setinformation 151 have been described, the functions and the processingcontents of the substrate processing system 10 are now described. FIG. 7is a functional block diagram showing the functional structure of thesubstrate processing system 10.

Referring to FIG. 7, the CPU 101 of the system control part 100 runs amaintenance program 154 thereby implementing a local instruction part121, a duplicate information acquisition part 122 and a restoreprocessing part 123 as processing parts. The storage part 104 stores themaintenance program 154.

Referring to FIG. 7, the CPU 21 of the information storage server 2 runsa maintenance program 252 thereby implementing a storing part 221 and adifferential extraction part 222 as processing parts. The hard disk 24stores the maintenance program 252. The CPU 31 of the support computer 3runs a maintenance program 351 thereby implementing a remote instructionpart 321 as a processing part. The hard disk 34 stores the maintenanceprogram 351.

The local instruction part 121 has a function of transmitting aninstructional command of backup processing for the set information 151and the control programs 152 and 153 to the duplicate informationacquisition part 122 and a function of transmitting an instructionalcommand of restore processing for the set information 151 and thecontrol programs 152 and 153 to the restore processing part 123.

The local instruction part 121 transmits the instructional command ofthe backup processing when determining the backup timing due to aschedule function provided therein. In addition to periodic backupprocessing according to the schedule function, the user may performinput operation through the operation part 140 of the substrateprocessing apparatus 1 for explicitly instructing backup processing forthe set information 151 and the control programs 152 and 153.

In other words, the set information 151 and the like are automaticallybacked up in a planned manner due to an instruction according to theschedule function. On the other hand, the user may instruct backupprocessing in order to preserve the current apparatus state at anarbitrary point of time such as before maintenance or before temporarystoppage of the apparatus 1.

When the local instruction part 121 issues an instructional command forbackup processing, the duplicate information acquisition part 122generates duplicate information of the set information 151 and thecontrol program 152 stored in the storage part 104 of the system controlpart 100 and the control program 153 stored in the storage part 114 ofthe unit control part 115 and transmits the generated duplicateinformation, i.e., the data of the set information 151 and the controlprograms 152 and 153, to the information storage server 2 through theLAN 41.

The backup processing may be performed on all data of the setinformation 151 and the control programs 152 and 153 or only individualdata.

As shown in FIG. 8, the local instruction part 121 comprises a schedulecontrol part 121 a. The schedule control part 121 a is a functional partsetting the schedule for the backup processing, and the localinstruction part 121 transmits the instructional command for the backupprocessing according to the schedule set in the schedule control part121 a. Schedule setting shows which information is backed up at whattiming.

For example, it is possible to schedule the backup processing to back upthe set information 151 every week while backing up the control programs152 and 153 every month. It is also possible to set whether to back upall data or to back up differential data, as described later. Forexample, it is possible to set a schedule to back up all data every weekas to the set information 151 while backing up differential data everyday. The user can set the schedule through the operation part 140. It ismore convenient to display a guidance menu on the display part 130 sothat the user can set the schedule according to the menu.

The duplicate information transmitted from the duplicate informationacquisition part 122 is transferred to the storing part 221 of theinformation storage server 2 so that the storing part 221 stores theduplicate information in the hard disk 24 serving as second storagemeans. FIG. 7 shows the duplicate information stored in the hard disk 24as backup data 251.

In order to back up differential data, i.e., when the schedule controlpart 121 a specifies backup operation of the differential data or theuser explicitly instructs to back up the differential data, theduplicate information acquisition part 122 adds information indicatingbackup of the differential data to the duplicate information andtransmits the same to the storing part 221. While the storing part 221can store the set information 151 and the control programs 152 and 153in the hard disk 24 as full data, the differential extraction part 222extracts differential data of backup object data and thereafter storesduplicate information in the hard disk 24 when receiving the informationinstructing to back up the differential data.

In other words, the differential extraction part 222 compares theduplicate information received from the duplicate informationacquisition part 122 with the backup data 251 stored in the hard disk24, and extracts the differential data.

When periodically performing backup processing according to the schedulefunction of the local instruction part 121, for example, the quantity ofthe backup data 251 stored in the hard disk 24 is remarkably increasedin a method of storing full data every time. Not only the latest databut also data backed up in the past may be required as the backup data251. For example, a request for returning the set information for theapparatus 1 to a state of several weeks ago may be received. Further, arequest for returning the flow recipe changed by trial and error to thatof two months ago may be received.

Therefore, it is effective to leave the backup data 251 at a largenumber of points over a long period, while the capacity of the hard disk24 is not unlimited. Therefore, the differential extraction part 222extracts the differential data between the duplicate information andprecedent backup data 251 and stores only the differential data in thehard disk 24.

Thus, the substrate processing system 10 according to the firstembodiment periodically stores the set information 151 for controllingthe operation of the substrate processing apparatus 1 and the controlprograms 152 and 153 in the information storage server 2 connected withthe substrate processing apparatus 1 through the network 6 as the backupdata 251, so that the user may not perform complicated backup operation.

In particular, the substrate processing apparatus 1 has the recipe data151 a updated according to the user's know-how and the apparatusintrinsic data 151 c adjusting the apparatus 1 while working the same onthe actual set position, and hence it is remarkably significant toperiodically back up these data 151 a and 151 c for preventing the samefrom disappearance.

While the substrate processing apparatus 1 is set in a clean room, datastored by backup processing can be maintained on the outside of theclean room when the information storage server 2 connected through thenetwork 6 is set outside the clean room.

While the user can manually perform the backup processing through theoperation part 140 of the substrate processing apparatus 1 in thisembodiment, the information server 2 may alternatively transmit aninstructional command for the backup processing through the network 6.Thus, the instructional command for the backup processing can betransmitted from outside the clean room.

The information storage server 2 may not necessarily be set in thesubstrate processing factory 4. Alternatively, a system managementcenter may be set in the vicinity of the substrate processing factory 4for transferring the backup data 251 through a private line.

According to the aforementioned processing, the information storageserver 2 saves the backup data 251 of the set information 151 and thecontrol programs 152 and 153 periodically or at arbitrary timing.

The restore processing part 123 comprised in the system control part 100fetches the backup data 251 from the hard disk 24 for restoring the setinformation 151 and the control programs 152 and 153.

The set information 151 and the control programs 152 and 153 may berestored at any timing. For example, the set information 151 and thecontrol programs 152 and 153 may disappear due to a hardware fault, orthe user may erroneously lose any data during maintenance operation.While the data are restored at abnormality restoration timing in thiscase, the user may request to return the set information 151 and thecontrol programs 152 and 153 to past backup data.

For example, the user may request to return the recipe data 151 aupdated for operating the substrate processing apparatus 1 to previousrecipe data 151 a. Further, the user newly finely controlling theoperation of the transfer robot TR and updating the teaching data mayrequest to return the teaching data to the previous state.

In this case, the user inputs an instruction for restore processingthrough the operation part 140 of the substrate processing apparatus 1.More specifically, the user instructs restore processing by specifyinginformation as to the data to be restored, the target of restoration andthe like. Thus, the local instruction part 121 transmits a restoreinstructional command to the restore processing part 123. The restoreprocessing part 123 refers to the backup data 251 stored in the harddisk 24 of the information storage server 2, extracts necessaryinformation and performs restore processing.

When the set information 151 and the control programs 152 and 153specified as the object of the restore processing are reserved as fulldata, the restore processing part 123 extracts the full data as such andstores the same in the storage part 104 of the system control part 100or the storage part 114 of the unit control part 115.

When the set information 151 and the control programs 152 and 153specified as the object of the restore processing are reserved asdifferential data, the restore processing part 123 extracts dataobtained by accumulating full data backed up before the date of backupof the differential data and differential data from the date of backupof the full data and the specified date. Thus, the restore processingpart 123 restores full data also as to the backup data 251 stored asdifferential data.

In the substrate processing system 10 according to the first embodiment,the information storage server 2 connected with each substrateprocessing apparatus 1 through the network 6 stores backed-up data,whereby restore operation can be readily performed through the network 6also in the restore processing. Thus, the restore operation can becompleted in a short time, thereby improving the working efficiency ofthe substrate processing apparatus 1.

As hereinabove described, the local instruction part 121 of the systemcontrol part 100 transmits a processing command thereby executing backupprocessing. The local instruction part 121 transmits the backupprocessing command according to the schedule function or when the userinputs an instruction through the operation part 140 of the substrateprocessing apparatus 1.

In the system structure according to the first embodiment, each supportcomputer 3 of the support center 5 is connected to the substrateprocessing apparatus 1 through the wide area network 61, and it is alsopossible to execute backup processing by remote control from the supportcomputer 3.

When a staff remote-controlling each substrate processing apparatus 1inputs an instruction for backup processing in the support computer 3 inthe support center 5, the remote instruction part 321 transmits a backupprocessing command through the network 6. When the backup processingcommand is transferred to the duplicate information acquisition part 122in the substrate processing apparatus 1, processing similar to the aboveis performed.

When the support center 5 performs backup processing by remote control,a more hospitable user support system can be provided. The backup data251 may be transferred to the support center 5.

2. Second Embodiment

A second embodiment of the present invention is now described. Theoverall schematic structure of a substrate processing system 10according to the second embodiment is identical to that shown in FIG. 1.The hardware structure of a substrate processing apparatus 1 isidentical to that of the first embodiment described with reference toFIGS. 2 and 3. The hardware structure each of an information storageserver 2 and a support computer 3 is also identical to that of the firstembodiment described with reference to FIG. 4.

Similarly to the first embodiment, the operation of the substrateprocessing apparatus 1 is controlled by control programs 152 and 153stored in storage parts 104 and 114 according to the procedure of apreviously described flow recipe. The control programs 152 and 153control the substrate processing apparatus 1 according to setinformation 151 stored in the storage part 104.

The contents of the set information 151 are identical to those of thefirst embodiment shown in FIG. 5. However, apparatus basic data 151 binclude an extremely large number of data species in addition to thoseillustrated with reference to the first embodiment. While these areinformation initialized every substrate processing apparatus 1, thesubstrate processing apparatus 1 cannot perform planned operation whenthe contents of partial data are erroneously set among the large numberof data. While it is possible to correct the operation of the substrateprocessing apparatus 1 with apparatus intrinsic data 151 c, suchcorrection is extremely complicated or impossible if the apparatus basicdata 151 b is not reliably set as basic information. In introduction orresetting of the substrate processing apparatus 1, therefore, theapparatus basic data 151 b must be correctly set.

FIG. 9 is a functional block diagram showing the functional structure ofthe substrate processing system 10 according to the second embodiment.Referring to FIG. 9, a CPU 101 of a system control part 100 runs amaintenance program 154 thereby implementing a basic data request part1121, a version acquisition part 1122 and a basic data registration part1123 as processing parts. The storage part 104 stores the maintenanceprogram 154.

Referring to FIG. 9, a CPU 21 of the information storage server 2 runs amaintenance program 252 thereby implementing a basic data request part1221 as a processing part. A hard disk 24 stores the maintenance program252.

Referring to FIG. 9, a CPU 31 of the support computer 3 rums amaintenance program 351 thereby implementing a basic data set part 1321as a processing part. A hard disk 34 stores the maintenance program 351.

The basic data request part 1121 is a functional part transmitting atransmission request for the apparatus basic data 151 b from thesubstrate processing apparatus 1 to the support center 5. The userinstructs acquisition of the apparatus basic data 151 b through anoperation part 140 provided on the substrate processing apparatus 1. Inresponse to input of this instruction, the basic data request part 1121requests the basic data set part 1321 of the support computer 3 totransmit the apparatus basic data 151 b.

In order to simplify the input operation by the operator, a display part130 may display a menu for acquiring the apparatus basic data 151 b.When the input operation is enabled according to guidance, the burden onthe operator can be abated. If the support center 5 has a plurality ofsupport computers 3 and the support computer 3 requested to transmit theapparatus basic data 151 b is unfixed, the operator specifies thesupport computer 3 for transmitting the apparatus basic data 151 b byinput operation.

The version acquisition part 1122 is a functional part detecting thesoftware version of the control program 152 controlling the overallsubstrate processing apparatus 1. While the substrate processingapparatus 1 requests the support computer 3 to transmit the apparatusbasic data 151 b, the set contents of the apparatus basic data 151 bvary with the software version of the control program 152 controllingthe substrate processing apparatus 1. Therefore, the substrateprocessing apparatus 1 posts the software version of the control program152 therefor to the support computer 3, thereby requesting transmissionof the apparatus basic data 151 b corresponding to the software version.

The basic data request part 1221 comprised in the information storageserver 2 also basically comprises a function similar to that of thebasic data request part 1121 comprised in the substrate processingapparatus 1. When the operator inputs a request instruction for basicdata through a keyboard 26 a or a mouse 26 b in the information storageserver 2, the basic data request part 1221 transmits a transmissionrequest instruction for the apparatus basic data 151 b.

However, it is assumed that operation for specifying the substrateprocessing apparatus 1 registering the apparatus basic data 151 b isperformed when the information storage server 2 requests transmission ofthe apparatus basic data 151 b. Thus, the information storage server 2can transmit a transmission request for the apparatus basic data 151 bas to all substrate processing apparatuses 1 set in substrate processingfactory 4. The basic data request part 1221 requests acquisition of thesoftware version to the version acquisition part 1122 of the substrateprocessing apparatus 1 through a LAN 41. Thus, the basic data requestpart 1221 transmits the transmission request for the apparatus basicdata 151 b to the support computer 3 after specifying the softwareversion.

FIG. 10 shows apparatus basic data 151 b of various versions stored inthe hard disk 34 of the support computer 3. The version of eachapparatus basic data 151 b corresponds to the software version of thecontrol program 152 for the substrate processing apparatus 1.

While the apparatus basic data 151 b is managed in correspondence to thesoftware version of the control program 152 controlling the overallsubstrate processing apparatus 1 according to the second embodiment,apparatus basic data corresponding to the control program 153controlling each processing unit may also be managed. In this case, theversion acquisition part 1122 of the system control part 100 alsodetects version information of the control program 153 stored in thestorage part 114 of a unit control part 115.

When receiving a transmission request instruction for the apparatusbasic data 151 b from the basic data request part 1121 (or the basicdata request part 1221), the basic data set part 1321 of the supportcomputer 3 acquires the software version of the control program 152included in the data of the transmission request instruction andextracts the apparatus basic data 151 b corresponding to this softwareversion from the hard disk 34. The basic data set part 1321 transmitsthe extracted apparatus basic data 151 b to the substrate processingapparatus 1.

In the substrate processing apparatus 1, the basic data registrationpart 1123 receives the apparatus basic data 151 b transmitted from thesupport computer 3 and stores the same in the storage part 104. Thus, itfollows that the substrate processing apparatus 1 is initialized incorrespondence to the control program 152 for this substrate processingapparatus 1.

FIG. 10 shows a state where a substrate processing apparatus 1Ainstalled with a control program 152 of a version 1.0 stores apparatusbasic data (Ver1.0) and a substrate processing apparatus 1B installedwith a control program 152 of a version 2.0 stores apparatus basic data(Ver2.0).

Thus, the substrate processing system 10 according to the secondembodiment can readily acquire the apparatus basic data 152 b which isbasic information for controlling the substrate processing apparatus 1through a network and reflect the same on the substrate processingapparatus 1, whereby it follows that stable initialization operation canbe performed on the same substrate processing apparatus 1 controlled bythe same software version. Also when performing initialization operationon a plurality of substrate processing apparatuses 1 controlled by thesame software version, the substrate processing apparatuses 1 areinitialized identically to each other. In other words, initializedstates of a plurality of substrate processing apparatuses 1 can besynchronized with each other. Thus, it is possible to completely avoiddispersion in setting between the apparatuses 1 caused when the operatormanually copies the apparatus basic data 151 b.

After the apparatus basic data 151 b is registered in each substrateprocessing apparatus 1, each substrate processing apparatus 1 performsintrinsic tuning. It follows that each substrate processing apparatus 1is optimally controlled according to the apparatus basic data 151 breceived from the support computer 3 and the apparatus intrinsic data151 c created every apparatus 2.

While the support computer 3 determines the software version of thecontrol program 152 installed in the substrate processing apparatus 1thereby transmitting the proper apparatus basic data 151 b in the secondembodiment, it is possible to transmit apparatus basic data 151 bresponsive to the types of respective substrate processing apparatuses 1also when different substrate processing apparatuses 1 are mixedlypresent if each substrate processing apparatus 1 posts the type thereofto the support computer 3 as information.

While the support computer 3 manages the apparatus basic data 151 b setin common for the substrate processing apparatuses 1 in the secondembodiment, the support computer 3 may alternatively manage theapparatus intrinsic data 151 c. While the apparatus intrinsic data 151 cis information intrinsic to each apparatus 1 as described above andhence the data 151 c may not necessarily be directly utilizable inanother apparatus, the user can use apparatus intrinsic data 151 c setfor a certain substrate processing apparatus 1 as know-how for anotherapparatus 1.

While the version acquisition part 1122 comprised in the system controlpart 100 automatically detects the software version of the controlprogram 152 in the second embodiment, this functional part is riotessential. As hereinabove described, the user may specify the softwareversion of the apparatus 1 when inputting the transmission requestinstruction for the apparatus basic data 151 b through the operationpart 140. In order to avoid an artificial error, however, it is morepreferable that the version acquisition part 1122 automatically detectsthe software version.

3. Third Embodiment

A third embodiment of the present invention is now described. FIG. 11schematically illustrates the structure of a substrate processing system10A according to the third embodiment. As shown in FIG. 11, thesubstrate processing system 10A has such a structure that a plurality ofprocessing apparatuses 1C and an information storage server 2 comprisedin a substrate processing factory 4, support computers 3 comprised in asupport center 5 where support staffs for the substrate processingapparatuses 1C are posted and an order acceptance server 8 comprised ina component center 7 supplying components of the substrate processingapparatuses 1 to the substrate processing factory 4 are connected witheach other through a network 6.

In the substrate processing system 10A, the information storage server 2accumulates consumptiveness information describing consumptiveness ofconsumables (hereinafter the term “components” indicates consumables)mounted on the substrate processing apparatuses 1C, so that the supportcomputers 3 can read the stored consumptiveness information through thenetwork 6. The order acceptance server 8 accepts orders for componentsthrough the network 6.

In the substrate processing factory 4, the substrate processingapparatuses 1C and the information storage server 2 are connected witheach other through a LAN (local area network) 41. The LAN 41 isconnected to a wide area network 61 such as the Internet through aconnector 42 having functions of a router, a firewall and the like. Thesupport center 5 also has a LAN 51 connected with the support computers3, and this LAN 51 is also connected to the wide area network 61 througha connector 52 having functions of a router, a firewall and the like.The component center 7 also has a LAN 71 connected with the orderacceptance server 8, and this LAN 71 is also connected to the wide areanetwork 61 through a connector 72 having functions of a router, afirewall and the like. Thus, various data communication can be madebetween the substrate processing apparatuses 1C, the information storageserver 2, the support computers 3 and the order acceptance server 8.Throughout the specification, the LANS 41, 51 and 71 and the wide areanetwork 61 are generically referred to as a network 6.

Referring to FIG. 11, the substrate processing factory 4 comprising theplurality of substrate processing apparatuses 1C may alternativelycomprise a single substrate processing apparatus 1C, and the supportcenter 5 comprising the plurality of support computers 3 may alsoalternatively comprise a single support computer 3. Further, thecomponent center 7 may alternatively comprise a plurality of orderacceptance servers 8.

Each of the substrate processing apparatuses 1C arranged on thesubstrate processing factory 4 is now described. FIG. 12 is a schematicplan view of the substrate processing apparatus 1C. This substrateprocessing apparatus 1C cleans front and back surfaces of substrates.The substrate processing apparatus 1C comprises an indexer ID deliveringunprocessed substrates from a carrier while receiving processedsubstrates and storing the same in the carrier, surface cleaningprocessing units SS bringing cleaning brushes into contact with thesurfaces of the substrates or approaching the former to the latter whilerotating the substrates thereby performing surface cleaning processing,back surface cleaning processing units SSR bringing cleaning brushesinto contact with the back surfaces of the substrates or approaching theformer to the latter while rotating the substrates thereby performingback surface cleaning processing and a transfer robot TR transferringthe substrates between the indexer ID and each cleaning processing unit.The substrate processing apparatus 1C also comprises a surface inversionunit (not shown).

FIG. 13 schematically illustrates the structure of each surface cleaningprocessing unit SS. The surface cleaning processing unit SS is theso-called spin scrubber. A spin chuck 13 is the so-called vacuum chuckvacuum-sucking the back surface of a substrate W thereby horizontallyholding the substrate W. A motor shaft 14 of an electric motor (notshown) is suspended on the center of the lower surface of the spin chuck13. The electric motor rotates the spin chuck 13 through the motor shaft14, thereby rotating the substrate W held by the same.

A cup 15 is arranged around the substrate W for receiving and recoveringa processing solution scattered from the rotated substrate W. The cup 15is vertically movable by a hoist mechanism (not shown). When the hoistmechanism moves the cup 15 downward, the upper end of the cup 15 islocated downward beyond the spin chuck 13. In this state, the transferrobot TR can introduce and discharge the substrate W into and from thespin chuck 13. When moved upward, the cup 15 encloses the substrate Wheld by the spin chuck 13 while the upper end of the cup 15 is locatedupward beyond the substrate W. The substrate W is cleaned while the cup15 is moved upward.

A cleaning brush 11 is mounted on the forward end of a brush arm 12. Thebrush arm 12 is vertically movable and swingable in a horizontal planethrough a driving mechanism (not shown). When performing surfacecleaning processing on the substrate W, the brush arm 12 is swung whilebringing the cleaning brush 11 into contact with the surface of thesubstrate W or approaching the former to the latter and rotating thesubstrate W, thereby removing contaminants such as particles adhering tothe surface of the substrate W. Each back surface cleaning processingunit SSR, which is substantially similar in structure to the surfacecleaning processing unit SS, employs the so-called mechanical chuckgrasping an edge of the substrate W thereby horizontally holding thesubstrate W as a spin chuck 13. In the third embodiment, the surfacecleaning processing units SS and the back surface cleaning processingunits SSR are generically referred to as processing units 110 performingprescribed processing on substrates.

FIG. 14 is a block diagram showing the structure of a control system forthe substrate processing apparatus 1C. As shown in FIG. 14, the controlsystem for the substrate processing apparatus 1C is formed by a systemcontrol part 100 controlling the overall apparatus 1C and unit controlparts 115 individually controlling a plurality of processing units 110.

The system control part 100 controlling the overall apparatus 1C in aunific manner comprises a microcomputer. More specifically, the systemcontrol part 100 comprises a CPU 101 serving as a body part, a ROM 102serving as a read-only memory storing a basic program and the like, aRAM 103 serving as a random-access memory mainly defining an arithmeticworking area, a storage part 104 consisting of a hard disk or the likestoring a software module and the like and a communication part 105performing data communication with an external device, which areconnected with each other by a bus line 190.

The communication part 105 is connected to the network 6 through anetwork interface (not shown), so that the substrate processingapparatus 1C can transmit/receive various data to/from the informationstorage server 2, the support computers 3 and the like. While thecommunication part 105 may perform either wire communication or radiocommunication through the network 6, a wire communication system isemployed in this embodiment.

Along with the system control part 100 and the plurality of processingunits 110, a display part 130 displaying various information, anoperation part 140 accepting input operation of a recipe and commandoperation from an operator, a reader 150 reading various data from arecording medium 91 such as a magnetic disk or a magnetooptic disk andthe like are also electrically connected to the bus line 190. Thus, datacan be transferred between the respective parts of the substrateprocessing apparatus 1C through the bus line 190 under control of thesystem control part 100.

Each processing unit 110 comprises the unit control part 115 along witha substrate processing part 116 serving as a working part (a mechanismrotating substrates, a mechanism discharging a processing solution tothe substrates, a mechanism driving the cleaning brush 11 or the like,for example) processing the substrates in practice. The unit controlpart 115, individually controlling the processing unit 110, controls andmonitors operation of the substrate processing part 116 of theprocessing unit 110 provided with this unit control part 115. In otherwords, the aforementioned system control part 100 takes charge of unificcontrol on the overall substrate processing apparatus 1C, while eachunit control part 115 takes charge of control responsive to theprocessing contents of each substrate processing part 116. The unitcontrol part 115 comprises a microcomputer similarly to the systemcontrol part 100. More specifically, the unit control part 115 comprisesa CPU 111 serving as the body part, a ROM 112 serving as a read-onlymemory storing a basic program and the like, a RAM 113 serving as arandom-access memory defining an arithmetic working area and a storagepart 114 consisting of an SRAM backed up with a battery for storingvarious data.

Each processing unit 110 is further provided with a timer 117 and acounter 118. The timer 117 has a function of measuring the used time(time used for substrate processing after exchange to a new cleaningbrush 11) of the component, such as the cleaning brush 11, for example,of the processing unit 110. When the processing unit 110 is providedwith a plurality of components, the timer 117 measures the used timeevery component. The counter 118 has a function of counting the numberof substrates (the number of substrates processed after exchange to anew cleaning brush 11) processed with the component, such as thecleaning brush 11, for example, of the processing unit 110. When theprocessing unit 110 is provided with a plurality of components, thecounter 118 measures the number of processed substrates every component.

The ROM 102 and the storage part 104 of the system control part 100previously store system control programs related to the overallapparatus 1C. When the CPU 101 of the system control part 100 executesarithmetic processing according to the system control programs, itfollows that operation control and data processing are implemented onthe overall substrate processing apparatus 1C. The ROM 112 and thestorage part 114 of the unit control part 115 previously store unitcontrol programs responsive to the processing contents of the substrateprocessing part 116 of this processing unit 110. When the CPU 111 of theunit control part 115 executes arithmetic processing according to theunit control programs, it follows that operation control and dataprocessing are implemented on the substrate processing part 116.

These programs can be acquired and updated by reading from the recordingmedium 91 through the reader 150 or downloading from a prescribed servermemory or the like through the network 6. Each program has a version,and version information such as a numerical value for identifying theversion is changed when the program is updated. The storage part 104 ofthe system control part 100 stores the version information of eachprogram run by the substrate processing apparatus 1C.

The information storage server 2 arranged on the substrate processingfactory 4, each support computer 3 arranged on the support center 5 andthe order acceptance server 8 arranged on the component center 7 are nowdescribed. The information storage server 2, the support computer 3 andthe order acceptance server 8 are similar in hardware structure to ageneral computer. Therefore, each of the basic structures of theinformation storage server 2, the support computer 3 and the orderacceptance server 8, which are similar to each other, is described withreference to FIG. 15. As shown in FIG. 15, each of the informationstorage server 2, the support computer 3 and the order acceptance server8 is formed by connecting a CPU 21, 31 or 81 (the CPU 21 for theinformation storage server 2, the CPU 31 for the support computer 3 andthe CPU 81 for the order acceptance server 8: this also applies to thefollowing description), a ROM 22, 32 or 82 storing the basic program anda RAM 23, 33 or 83 storing various information to a bus line. A harddisk 24, 34 or 84 storing various information, a display 25, 35 or 85displaying various information, a keyboard 26 a, 36 a or 86 a and amouse 26 b, 36 b or 86 b accepting input from the operator, a reader 27,37 or 87 reading various data from the recording medium 91 such as anoptical disk, a magnetic disk or a magnetooptical disk and acommunication part 28, 38 or 88 making communication with the externaldevice through the network 6 are also connected to the bus line properlythrough interfaces (I/F) or the like.

Each of the information storage server 2, the support computer 3 and theorder acceptance server 8 can read a program from the recording medium91 through the reader 27, 37 or 87 and store the same in the hard disk24, 34 or 84. Each of the information storage server 2, the supportcomputer 3 and the order acceptance server 8 can also download a programfrom another server through the network 6 and store the same in the harddisk 24, 34 or 84. The CPU 21, 31 or 81 executes arithmetic processingaccording to the program stored in the hard disk 24, 34 or 84 forperforming operation. In other words, it follows that the informationstorage server 2 performs operation as the information storage server 2,the support computer 3 performs operation as the support computer 3 andthe order acceptance server 8 performs operation as the order acceptanceserver 8 as a result of executing arithmetic operation according to theprogram.

While the hardware structures of the substrate processing system 10A andthe substrate processing apparatus 1C, the information storage server 2,the support computer 3 and the order acceptance server 8 forming thesame have been described, the function and the processing contents ofthe substrate processing system 10A are now described. FIG. 16 is afunctional block diagram showing the functional structure of thesubstrate processing system 10A. FIG. 17 is a flow chart showing theprocedure in the substrate processing system 10A. Referring to FIG. 16,the CPU 21 of the information storage server 2 runs processing programsthereby implementing a consumptiveness information registration part 231and an information uncasing part 236 as processing parts respectively,and the CPU 31 of the support computer 3 runs processing programsthereby implementing a WEB browser 312, a warning part 313 and an ordersignal transmission part 314 as processing parts respectively.

At a step S1 in FIG. 17, consumptiveness of a component of the substrateprocessing apparatus 1C is measured. The consumptiveness is measuredevery processing unit 110. According to this embodiment, the timer 117measures the used time of the component such as the cleaning brush 11 asthe consumptiveness. The unit control part 115 collects the measuredconsumptiveness every processing unit 110 and transmits the same to thesystem control part 100. The system control part 100 collects themeasured consumptiveness every substrate processing unit 1C andtransmits the consumptiveness of each component of the substrateprocessing apparatus 1C to the consumptiveness information registrationpart 231 of the information storage server 2 from the communication part105 through the LAN 41.

Then, the process advances to a step S2 in FIG. 17, so that theconsumptiveness information registration part 231 registers theconsumptiveness of each component of the substrate processing apparatus1C in the hard disk 24. The hard disk 24 cumulatively stores theconsumptiveness every component of each substrate processing apparatus1C as consumptiveness information 241.

FIG. 18 illustrates exemplary consumptiveness information 241. Referringto FIG. 18, the column of “apparatus” shows identification numbersassigned to the respective substrate processing apparatuses 1C, thecolumn of “component” shows the names of the consumables, and thecolumns of “used time” and “number of processed substrates” show theconsumptiveness. This embodiment employs the used time as theconsumptiveness, and hence the consumptiveness information 241 describesno number of processed substrates. As shown in FIG. 18, theconsumptiveness information 241 accumulates the consumptiveness everycomponent as to each of the substrate processing apparatuses 1C arrangedon the substrate processing factory 4. As to a substrate processingapparatus 1C having an apparatus number “8101”, for example, theconsumptiveness information 241 records that the used time of a cleaningbrush 11 provided with a name “brush 2” is 12 hours. The timer 117measures the used time of each component at a constant interval and theconsumptiveness information registration part 231 sequentially registersthe result of measurement in the hard disk 24 thereby constructing theconsumptiveness information 241.

The information uncasing part 236 uncases the consumptivenessinformation 241 accumulated in the hard disk 24 of the informationstorage server 2 to be readable through the network 6. The staff at thesupport center 5 can read the consumptiveness information 241 byacquiring the consumptiveness information 241 accumulated in the harddisk 24 from the information uncasing part 236 through the WEB browser312 and displaying the same on the display 35 for confirming theconsumptiveness of each component of the substrate processing apparatus1C arranged on the substrate processing factory 4. Thus, the supportcenter 5 can efficiently manage the consumptiveness of each component ofthe substrate processing apparatus 1C. The consumptiveness information241 is regularly acquired through the WEB browser 312.

The CPU 31 of the support computer 3 determines whether or not theconsumptiveness of the component of the substrate processing apparatus1C is in excess of a previously set prescribed value on the basis of theconsumptiveness information 241 acquired through the WEB browser 312(step S3). The CPU 31 makes this determination every componentregistered in the consumptiveness information 241, i.e., every componentof the plurality of substrate processing apparatuses 1C. When theconsumptiveness of any component exceeds the previously set prescribedvalue, i.e., when the used time exceeds the prescribed value, theprocess advances to a step S4 so that the warning part 313 gives awarning for prompting exchange of the component. In other words, thewarning part 313 gives the warning for prompting exchange of thecomponent when the consumptiveness of the component accumulated in thehard disk 24 reaches the prescribed value. The warning can be displayedon the display 35 or given as a sound, for example.

The staff for maintaining the substrate processing apparatus 1C canrecognize that the component approaches the end of its life through thewarning for prompting exchange.

When the consumptiveness of any component is in excess of the previouslyset prescribed value, the process advances to a step S5 so that theorder signal transmission part 314 transmits an order signal for a newcomponent to the order acceptance server 8 in the third embodiment. Whenthe consumptiveness of the component accumulated in the hard disk 24reaches the prescribed value, the order signal transmission part 314transmits the order signal for the new component for exchanging for thiscomponent to the order acceptance server 8.

When the order acceptance server 8 receives the order signal, thecomponent center 7 immediately progresses processing of supplying thenew component to the substrate processing factory 4. The steps S4 and S5may be replaced with each other in order, or may be simultaneouslycarried out.

According to the third embodiment, it follows that a new component isalready prepared in the substrate processing factory 4 when anycomponent of the substrate processing apparatus 1C is consumed orbroken, whereby the component can be immediately exchanged and the stoptime of the substrate processing apparatus 1C following this componentexchange can be minimized so that the apparatus 1C can be inhibited fromremarkable reduction of working efficiency.

As the aforementioned prescribed value, therefore, it is preferable toset a value immediately before the component is consumed to an unusablestate as a value requiring exchange. When any component becomes unusableafter a lapse of a used time of 100 hours, for example, the period of 90hours is set as the value requiring exchange. The life of each componentmay be experimentally obtained for calculating the value requiringexchange, or the value requiring exchange may be stochastically obtainedfrom the consumptiveness information 241 accumulated in theaforementioned manner. More specifically, the consumptivenessinformation 241 records consumptiveness every component, so thatconsumptiveness can be grasped when the component becomes unusable. Thelife of each component can be obtained by grasping consumptivenesslevels leading to unusable states as to a plurality of components andstochastically processing the same, so that the value (value requiringexchange) immediately before the component is consumed to an unusablestate can be decided on the basis of the life.

While the information storage server 2 is arranged in the substrateprocessing factory 4 in the third embodiment, the present invention isnot restricted to this but the information storage server 2 may bearranged anywhere so far as the same is connected to the network 6 to becapable of making communication with the substrate processing apparatus1C and the support computer 3.

While both of warning and transmission of the order signal are performedwhen the consumptiveness of any component is in excess of the previouslyset prescribed value in the third embodiment, only either thereof may beperformed. When only warning is performed and the support staff of thesupport center 5 recognizing that any component approaches the end ofits life orders a new component to the component center 7 with e-mail orthe like, it follows that a new component is prepared in the substrateprocessing factory 4 when the component of the substrate processingapparatus 1C is consumed or broken, whereby the component can beimmediately exchanged and the substrate processing apparatus 1C can beinhibited from remarkable reduction of working efficiency.

Neither warning nor transmission of the order signal may be performed.In this case, it follows that the support staff of the support center 5monitoring the consumptiveness information 241 determines the exchangeperiod and orders a new component to the component center 7 with e-mailor the like.

While the consumptiveness information 241 is constructed so that thesupport computer 3 determines whether or not the consumptiveness of anycomponent is in excess of the previously set prescribed value (valuerequiring exchange) in the third embodiment, the system control part 100of the substrate processing apparatus 1C may alternatively directlytransmit the consumptiveness of the component to the support computer 3without constructing the consumptiveness information 241.

While the used time is employed as the consumptiveness in the thirdembodiment, the number of processed substrates may alternatively beemployed as the consumptiveness. When the number of processed substratesis employed as the consumptiveness, the counter 118 measures the numberof substrates processed with any component such as the cleaning brush 11as the consumptiveness. Handling of the measured consumptiveness isidentical to that of the aforementioned used time. Also in this case, aneffect similar to that in the case of employing the used time as theconsumptiveness can be attained. Further alternatively, both of the usedtime and the number of processed substrates may be employed as theconsumptiveness. In this case, warning may be given or an order signalfor a new component may be transmitted when either the used time or thenumber of processed substrates is in excess of the previously setprescribed value.

Further, not the support computer 3 but the substrate processingapparatus 1C or the information storage server 2 may have the warningfunction and the function of transmitting an order signal for a newcomponent. FIG. 19 is a functional block diagram showing the functionalstructure of a substrate processing system 10A provided with a substrateprocessing apparatus 1C having a warning function and a function oftransmitting a component order signal. Referring to FIG. 19, elementshaving the same functions as those in FIG. 16 are denoted by the samereference numerals. Referring to FIG. 19, a CPU 101 of a system controlpart 100 runs processing programs thereby implementing an order signaltransmission part 108 and a warning part 109 as processing parts havingroles identical to those of the order signal transmission part 314 andthe warning part 313 shown in FIG. 16 respectively.

In this case, the system control part 100 (in a strict sense, the CPU101) determines whether or not consumptiveness measured by a timer 117or a counter 118 is in excess of a previously set prescribed value(value requiring exchange) so that the warning part 109 gives warningfrom a display part 130 or the like or the order signal transmissionpart 108 transmits an order signal for a new component from acommunication part 105 to an order acceptance server 8 through a network6. An effect similar to that of the third embodiment can be attainedalso in this case.

While it is assumed that the substrate processing apparatus 1C performscleaning processing on substrates and the consumptiveness of thecleaning brush 11 forming the same is managed in the third embodiment,the present invention is not restricted to this but the techniqueaccording to the present invention can be applied also to a case ofmanaging consumptiveness of a lamp forming a lamp annealing apparatusheating substrates by photoirradiation, for example. Further, thetechnique according to the present invention is also applicable to acase of managing consumptiveness of a belt, cylinder, a motor or thelike for driving the transfer robot TR as a consumable.

4. Fourth Embodiment

A fourth embodiment of the present invention is now described. Theoverall structure of a substrate processing system 10 according to thefourth embodiment is identical to that shown in FIG. 1. In the substrateprocessing system 10 according to the fourth embodiment, however, eachsupport computer 3 distributes educational information related tooperation of each substrate processing apparatus 1 to the substrateprocessing apparatus 1 through a network 6, and a staff delivering alecture on the operation of the substrate processing apparatus 1 isposted at a support center 5.

The hardware structure of the substrate processing apparatus 1 isidentical to that in the first embodiment described with reference toFIGS. 2 and 3. Further, the hardware structure of each of an informationserver 2 and the support computer 3 is also identical to that in thefirst embodiment described with reference to FIG. 4.

FIG. 20 is a functional block diagram showing the functional structureof the substrate processing system 10 according to the fourthembodiment. Referring to FIG. 20, a CPU 101 of a system control part 100runs a control program thereby implementing a distribution request part2108 as a processing part, and a CPU 31 of the support computer 3 runs acontrol program thereby implementing a distribution part 2315 as aprocessing part.

A hard disk 34 comprised in the support computer 3 of the support center5 stores an educational program 2341. The CPU 31 of the support center 3reads and runs the educational program 2341, so that the distributionpart 2315 can distribute educational information related to operation ofeach substrate processing apparatus 1 of a substrate processing factory4 from a communication part 38 through a network 6. The technique ofstreaming distribution, for example, may be employed as the mode ofdistribution. A communication part 105 receives the educationalinformation distributed from the support computer 3 and displays thesame on a display part 130.

As to the timing of distribution, educational information may besimultaneously be distributed to a plurality of substrate processingapparatuses 1 arranged on a certain substrate processing factory 4regardless of presence/absence of distribution requests from thesubstrate processing apparatuses 1, or may be distributed only to asubstrate processing apparatus 1 presenting a distribution request. Morespecifically, the distribution request part 2108 transmits adistribution request to the support computer 3 from the communicationpart 105 through the network 6 when a distribution request command isinput from an operation part 140. The distribution part 2315 of thesupport computer 3 receiving the distribution request distributes theeducational information to the substrate processing apparatus 1 from thecommunication part 38 through the network 6.

In a case of simultaneously delivering a lecture on operationexplanation to a large number of operators of the substrate processingfactory 4, educational information may be simultaneously distributed tothe plurality of substrate processing apparatuses 1. The large number ofoperators can learn the method of operating the apparatuses 1 bydispersing to each substrate processing apparatus 1 in small groups andobserving the educational information displayed on the display parts130.

In a case of delivering a lecture on operation explanation to partialunskilled operators of the substrate processing factory 4, the operatorsmay be posted to any substrate processing apparatus 1 which in turnpresents a distribution request so that educational information isdistributed only to this substrate processing apparatus 1. The operatorscan lean the method of operating the apparatus 1 by observing theeducational information displayed on the display part 130.

In either case, an apparatus vendor can deliver the lecture on operationexplanation by simply creating the educational program 2341 and storingthe same in the support computer 3, while a user can hold the lecturerelated to operation explanation repeatedly at desired timing forefficiently educating the operators with reference to the operation.

While the support computer 3 stores the educational program 2341 so thatthe support center 5 distributes the educational information to thesubstrate processing apparatus 1 through the Internet in the fourthembodiment, the information storage server 2 may alternatively have therole of the support computer 3. FIG. 21 is a functional block diagramshowing another exemplary functional structure of the substrateprocessing system 10 according to the fourth embodiment. Referring toFIG. 21, a CPU 21 of an information storage server 2 runs a controlprogram thereby implementing a distribution part 2215 as a processingpart.

A hard disk 24 comprised in the information storage server 2 stores aneducational program 2241. The CPU 21 of the information storage server 2reads and runs this educational program 2241 so that the distributionpart 2215 can distribute educational information related to operation ofeach substrate processing apparatus 1 of a substrate processing factory4 from a communication part 28 through a LAN 41. The mode and the timingof distribution are similar to those of the aforementioned embodiment.

Also when distributing the educational information through the LAN 41,an apparatus vendor can deliver a lecture on operation explanation bysimply creating the educational program 2241 and storing the same in theinformation storage server 2, while a user can hold the lecture relatedto operation explanation repeatedly at desired timing for efficientlyeducating operators with reference to the operation.

The technique according to the present invention is applicable to anysubstrate processing apparatus, such as a lamp annealing apparatusheating substrates by photoirradiation, a cleaning apparatus performingcleaning processing of removing particles while rotating substrates or adipping apparatus performing surface processing by dipping substrates ina processing solution such as hydrofluoric acid, for example, performingprescribed processing on substrates.

While the invention has been shown and described in detail, theforegoing description is in all aspects illustrative and notrestrictive. It is therefore understood that numerous modifications andvariations can be devised without departing from the scope of theinvention.

1. A substrate processing apparatus management system having a substrateprocessing apparatus and a support center including an informationstorage computer that is operable to collecting information about saidsubstrate processing apparatus, said substrate processing apparatus andsaid support center being communicatively connected with each otherthrough a communication network, said management system, comprising: a)a first storage element storing control information for controllingoperation of said substrate processing apparatus, said controlinformation including a control program for controlling said substrateprocessing apparatus and set information defining said operation of saidsubstrate processing apparatus, wherein said set information includes:basic information for defining said operation of said substrateprocessing apparatus, and correction information added to said basicinformation for optimizing control of said substrate processingapparatus; b) a backup information acquisition element acquiring backupinformation backing up said control information stored in said firststorage element, said control information including said control programfor controlling said substrate processing apparatus and said setinformation defining said operation of said substrate processingapparatus; c) a storing element storing said backup information acquiredby said backup information acquisition element in a second storageelement comprised in said information storage computer; and d) a restoreprocessing element fetching said backup information stored in saidsecond storage element and storing said backup information as restoredcontrol information in said first storage element, said restored controlinformation including said control program for controlling saidsubstrate processing apparatus and said set information defining saidoperation of said substrate processing apparatus.
 2. The substrateprocessing apparatus management system according to claim 1, furthercomprising: e) a schedule control part making said backup informationacquisition element periodically execute processing of acquiring saidbackup information.
 3. The substrate processing apparatus managementsystem according to claim 2, wherein said storing element comprises: c1)an element extracting differential information between said backupinformation of said control information acquired by said backupinformation acquisition element and backup information already stored insaid second storage element, and c2) an element storing saiddifferential information in said second storage element.
 4. Thesubstrate processing apparatus management system according to claim 3,further comprising: f) a remote control computer, connected with saidsubstrate processing apparatus through a wide area network, comprising aremote instruction element transmitting an instructional command foracquiring said backup information to said backup information acquisitionelement.
 5. The substrate processing apparatus management systemaccording to claim 1, wherein said basic information includes robotbasic data defining operation of a transfer robot of said substrateprocessing apparatus, and said correction information includes teachingdata for correcting said robot basic data to adjust the operation ofsaid transfer robot.
 6. The substrate processing apparatus managementsystem according to claim 1, wherein said basic information includestemperature control data setting temperature of a thermal processingunit of said substrate processing apparatus, and said correctioninformation includes temperature control correction data for correctingthe temperature control data.
 7. A substrate processing apparatusconnected to a prescribed computer through a network, comprising: a) afirst storage element storing control information for controllingoperation of said substrate processing apparatus, said controlinformation including a control program for controlling said substrateprocessing apparatus and set information defining said operation of saidsubstrate processing apparatus, wherein said set information includes:basic information for defining said operation of said substrateprocessing apparatus, and correction information added to said basicinformation for optimizing control of said substrate processingapparatus; b) a backup information acquisition element acquiring backupinformation backing up said control information stored in said firststorage element, said control information including said control programfor controlling said substrate processing apparatus and said setinformation defining said operation of said substrate processingapparatus; c) a transmission element transmitting said backupinformation acquired by said backup information acquisition element tosaid computer; and d) a restore processing element fetching said backupinformation and upon receiving said backup information from saidcomputer, storing said backup information as restored controlinformation in said first storage element, said restored controlinformation including said control program for controlling saidsubstrate processing apparatus and said set information defining saidoperation of said substrate processing apparatus.
 8. The substrateprocessing apparatus according to claim 7, further comprising: e) aschedule control element making said backup information acquisitionelement periodically execute processing of acquiring said backupinformation.
 9. The substrate processing apparatus according to claim 7,wherein said basic information includes robot basic data definingoperation of a transfer robot of said substrate processing apparatus,and said correction information includes teaching data for correctingsaid robot basic data to adjust the operation of said transfer robot.10. The substrate processing apparatus according to claim 7, whereinsaid basic information includes temperature control data settingtemperature of a thermal processing unit of said substrate processingapparatus, and said correction information includes temperature controlcorrection data for correcting the temperature control data.
 11. Asubstrate processing apparatus management method for use with amanagement system having a substrate processing apparatus and a supportcenter including an information storage computer that is operable tocollecting information about said substrate processing apparatus, saidsupport center and said substrate processing apparatus beingcommunicatively connected with each other through a communicationnetwork, the method comprising steps of: a) storing in a first storageelement comprised in said substrate processing apparatus, controlinformation for controlling operation of said substrate processingapparatus, said control information including a control program forcontrolling said substrate processing apparatus and set informationdefining said operation of said substrate processing apparatus, whereinsaid set information includes: basic information for defining saidoperation of said substrate processing apparatus, and correctioninformation added to said basic information for optimizing control ofsaid substrate processing apparatus; b) acquiring as backup informationbacking up said control information stored in said first storageelement, said control information including said control program forcontrolling operation of said substrate processing apparatus and saidset information defining said operation of said substrate processingapparatus; c) storing said backup information acquired in step b) in asecond storage element comprised in said information storage computer;and, d) performing restore processing by fetching said backupinformation stored in said second storage element in step (c) andstoring said backup information as restored control information in saidfirst storage element, said restored control information including saidcontrol program for controlling said substrate processing apparatus andsaid set information defining said operation of said substrateprocessing apparatus.
 12. The substrate processing apparatus managementmethod according to claim 11, wherein said step a) is periodicallyexecuted.
 13. The substrate processing apparatus management methodaccording to claim 12, wherein said step b) further includes the stepsof: b-1) extracting differential information between said backupinformation acquired in said step a) and backup information alreadystored in said second storage element, and b-2) storing saiddifferential information in said second storage element.
 14. Thesubstrate processing apparatus management method according to claim 13,wherein said step a) is performed by a remote control computer connectedwith said substrate processing apparatus through a wide area network.15. The substrate processing apparatus management method according toclaim 11, wherein said basic information includes robot basic datadefining operation of a transfer robot of said substrate processingapparatus, and said correction information includes teaching data forcorrecting said robot basic data to adjust the operation of saidtransfer robot.
 16. The substrate processing apparatus management methodaccording to claim 11, wherein said basic information includestemperature control data setting temperature of a thermal processingunit of said substrate processing apparatus, and said correctioninformation includes temperature control correction data for correctingthe temperature control data.
 17. A computer-readable recording mediumcomprising computer executable instructions for a computer included in asubstrate processing apparatus, said substrate processing apparatusbeing connected with an outer computer through a network, whereinexecution of said program by said computer in said substrate processingapparatus enables said substrate processing apparatus to execute aprocess comprising: a) acquiring backup information backing up controlinformation stored in a first storage element comprised in saidsubstrate processing apparatus, for controlling operation of saidsubstrate processing apparatus, said control information including acontrol program for controlling said substrate processing apparatus andset information defining said operation of said substrate processingapparatus, wherein said set information includes: basic information fordefining said operation of said substrate processing apparatus, andcorrection information added to said basic information for optimizingcontrol of said substrate processing apparatus; b) transmitting saidbackup information acquired in step a) to said outer computer forstoring said backup information in a second storage element comprised insaid outer computer; and c) performing restore processing by fetchingsaid backup information transmitted and stored in said second storageelement of said outer computer in step (b) and upon receiving saidbackup information from said outer computer, storing said backupinformation as restored control information in said first storageelement, said restored control information including said controlprogram for controlling said substrate processing apparatus and said setinformation defining said operation of said substrate processingapparatus.
 18. The computer-readable recording medium according to claim17, wherein said basic information includes robot basic data definingoperation of a transfer robot of said substrate processing apparatus,and said correction information includes teaching data for correctingsaid robot basic data to adjust the operation of said transfer robot.19. The computer-readable recording medium according to claim 17,wherein said basic information includes temperature control settingtemperature of a thermal processing unit of said substrate processingapparatus, and said correction information includes temperature controlcorrection data for correcting the temperature control data.